Chemical Vapor Deposition

Materials Deposited by CVD


Ultramet specializes in the deposition of refractory metals and ceramics. Please contact the company for your needs and applications. The following are some of the materials with which Ultramet possesses broad experience:



Rhenium (Re)
Tantalum (Ta)
Tungsten (W)
Niobium (Nb)
Molybdenum (Mo)

Iridium (Ir)

Platinum (Pt)
Boron (B)
Silicon (Si)
Metal alloys: W-Re, Ta-W,
  Mo-Re, Ir-Pt



Nonoxide ceramics

Tantalum carbide (TaC)
Tantalum nitride (TaN)
Tantalum diboride (TaB2)
Tungsten carbide (WC)
Tungsten diboride (WB2)
Hafnium carbide (HfC)
Hafnium nitride (HfN)
Hafnium diboride (HfB2)
Zirconium carbide (ZrC)
Zirconium nitride (ZrN)
Zirconium diboride (ZrB2)
Silicon carbide (SiC)
Silicon nitride (Si3Ni4)

Niobium carbide (NbC)
Niobium nitride (NbN)
Niobium diboride (NbB2)
Titanium carbide (TiC)
Titanium nitride (TiN)
Titanium diboride (TiB2)
Vanadium carbide (VC)
Vanadium nitride (VN)
Boron carbide (B4C)

Boron nitride (BN)


Oxide ceramics

Alumina (Al2O3)
Hafnia (HfO2)
Silica (SiO2)
Tantala (Ta2O5)

Titania (TiO2)
Yttria (Y2O3)
Zirconia (ZrO2)